Nano-copper oxide film materials have good gas-sensing characteristics. When the film is exposed to gases of different compositions and concentrations, its resistivity will change accordingly. Generally speaking, when reducing gas is adsorbed on the surface of the film, the resistivity of the film will decrease due to the reduction reaction. The higher the gas concentration, the lower the resistivity; on the contrary, when the oxidizing gas is adsorbed on the surface of the film, it is due to oxidation. The film resistivity will increase with the increase of gas concentration. According to this characteristic, various gas sensors can be manufactured. Nano-copper oxide is a typical surface-controlled gas-sensitive material. Generally, the smaller the particle size, the larger the specific surface area, the greater the oxygen adsorption capacity, and the higher the gas sensitivity of the material; in addition, noble metals are incorporated or coated with noble metals Catalytic coating can improve its sensitivity and selectivity. The nano-copper oxide film prepared by the sputtering method is very sensitive to H2, NO2, CO, and has a particularly high sensitivity to NO2 at low temperatures; the Al-doped nano-copper oxide film can be at 400℃ The sensitivity to CO reaches 61.6%.

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